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PLANARHD Scheda tecnica (PDF) - AEROTECH US. ALL RIGHTS RESERVED.
PLANARHD Datasheet PDF - AEROTECH US. ALL RIGHTS RESERVED.
Il numero della parte PLANARHD
Scarica  PLANARHD Scarica
Grandezza file   792.9 Kbytes
Page   3 Pages
Produttore elettronici  AEROTECH [AEROTECH US. ALL RIGHTS RESERVED.]
Homepage  https://www.aerotech.com/
Logo AEROTECH - AEROTECH US. ALL RIGHTS RESERVED.
Spiegazioni elettronici Two-Axis Air-Bearing Direct-Drive Linear Stage

PLANARHD Datasheet (PDF)

Go To PDF Page Scarica Scheda tecnica
PLANARHD Datasheet PDF - AEROTECH US. ALL RIGHTS RESERVED.

Il numero della parte PLANARHD
Scarica  PLANARHD Click to download

Grandezza file   792.9 Kbytes
Page   3 Pages
Produttore elettronici  AEROTECH [AEROTECH US. ALL RIGHTS RESERVED.]
Homepage  https://www.aerotech.com/
Logo AEROTECH - AEROTECH US. ALL RIGHTS RESERVED.
Spiegazioni elettronici Two-Axis Air-Bearing Direct-Drive Linear Stage

PLANARHD Scheda tecnica (HTML) - AEROTECH US. ALL RIGHTS RESERVED.


PLANARHD Dettagli del prodotto

KEY FEATURES:

‹ M AXIMIZES THROUGHPUT with
velocity to 2 m/s & acceleration to 5 g
‹ Incorporates active yaw &
orthogonality control for MAXIMUM
PRECISION
‹ IMPROVES TURNAROUND TIME
with dual linear-motor H-bridge design
‹ Maintains thermal stability with
optional AIR- & WATER-COOLING
FEATURES for optimal performance
‹ Optimizes move-and-settle time &
contouring performance with available
ENHANCED THROUGHPUT
MODULE
‹ Available with LASER
INTERFEROMETER FEEDBACK for
best performance at the wafer plane




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