FEATURES
❏ Flow rate measurment in wide range
Available for wide range from 0 to 5mL/min(nor) to 0 to 400 L/min (nor).
❏ High accuracy
±1%F.S. (High performance type)
❏ Miniaturization and improvement of reliability
❏ The following functions possible to add optionally.
Slow start function (Normal close type)
Output signal : 1 to 5VDC
APPLICATIONS
❏ Utility gas supply lines in industries
❏ Various instruments for analysis
❏ Semiconductor gas supply lines
❏ Gas constant fl ow control and mixture control
❏ Embedded devices