304FS datasheet(2/4 Pages) HP

2 / 4 page

Technical Specification

Pumping speed

ISO 100 / CF 6”

ISO 160 / CF 8”

250 L/s

255 L/s

220 L/s

250 L/s

255 L/s

220 L/s

250 L/s

Gas throughput at full

rotational speed (with

recomm. forepump)

Ambient Temp.

(25 °C)

Water Temp.

(25 °C, 50 L/h)

170 SCCM

110 SCCM

Compression ratio and foreline tolerance

> 1 x 1011

> 1 x 108

1.5 x 106

> 1 x 1011

>10 mbar

>4 mbar

>10 mbar

Base pressure with

recommended forepump

(5 m3/h)

< 1 x 10-10 mbar

(< 1 x 10-10 Torr)

Foreline flange

KF16 NW (KF25 - optional)

Rotational speed

60000 rpm (1010 Hz driving frequency)

Start-up time

< 3 minutes

Technical Specification

Recommended forepump

mechanical: Agilent DS 102

dry pump: Agilent IDP-7

Operating position

Any

Oper. ambient temperature

+5 °C to +35 °C

Rel. humidity of air

0 to 90% (not condensing)

Bakeout temperature

80 °C at inlet flange max (ISO flange)

120 °C at inlet flange max (CFF flange)

Lubricant

Permanent grease lubrication

Cooling requirements

Forced air (5- 35 °C ambient temperature)

Water (mandatory if ambient temp. > 35 °C)

Water temperature from +15°C to +25°C

Water flow min. 100L/h

Coolant water

Minimum flow: 50 L/h (0.89 GPM)

Temperature: +15 °C to +30°C

Pressure: 3 to 5 bar (45 to 75 psi)

Noise Pressure level

< 50 dB(A) at 1 meter

Max altitude

3000 m

Weight kg (lbs)

Pump ISO 100

Pump CFF 6’’

Pump ISO 160

Pump CFF 8’’

5.5 kg (12.3)

7.5 kg (16.5)

5.7 kg (12.6)

9.7 kg (20.9)

Conformity to norms

EMC (Control Units)

Safety (CE/CSA)

ROHS

61326-1

DIR 2006/42/CE

DIR 2011/65/EU

Outline Drawing

Technical Specification

3D Drawings available for download

ISO 100K

CFF 6"

FORELINE

FLANGE KF16

ELECTRICAL

CONNECTOR

WATER

COOLING

VENT

SCREW

FORELINE

FLANGE KF16

ELECTRICAL

CONNECTOR

WATER

COOLING

PURGE

SCREW

PURGE

SCREW

VENT

SCREW

144 [5.67]

86.29

[3.40]

38 [1.50]

86.5 [3.41]

36°

27°

86.29

[3.40]

38 [1.50]

86.5 [3.41]

36°

27°

39°

304FS Scheda tecnica(PDF) 2 Page - Agilent(Hewlett-Packard)

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