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DFG8830 Scheda tecnica(PDF) 2 Page - DISCO Corporation |
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DFG8830 Scheda tecnica(HTML) 2 Page - DISCO Corporation |
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2 / 2 page ![]() Fully Automatic Grinder DFG8830 DFG8830 Operation flow [1] The robot pick removes the wafer from the cassette and places it on the positioning table, where centering takes place. [2] The transfer arm places the wafer on the chuck table. [3] - [6] Grinding [7] The transfer arm removes the wafer from the chuck table and places it on the spinner. [8] Cleaning and drying [9] The robot pick returns the workpiece to the cassette. Specification Environmental conditions • Use clean, oil-free air at a dew point of -15 °C or less. (Use a residual oil: 0.1 ppm. Filtration rating:0.01 μm/99.5 % or more). • Keep room temperature fluctuations within ±1 °C of the set value. (Set value should be between 20 - 25 °C). • Keep grinding water and cleaning water + 0 - 2 °C above room temperature (fluctuations within 1 °C over one hour). • Keep spindle cooling water temperature between 20 - 25 °C (fluctuations within 2 °C over an hour). • The machines should be used in an environment, free from external vibration. Do not install machine near a ventilation opening, heat generation equipment or oil mist generating parts. • This machine uses water. • In case of water leakage, please install the machine on the floor with sufficient waterproofing and drainage treatments. * All the pressures are described using gauge pressures. * The above specifications may change due to technical modifications. Please confirm when placing your order. * For further information please contact your local sales representatives. Unit - φ 4” –φ 6” - φ 5” –φ 8” In-feed grinding with wafer Rotation mm φ 300 Diamond Wheel Rated Output kW 6.3 Rated torque range min -1 1,000 - 4,000 Thickness variation within one wafer 3 or less Thickness variation between wafers ±3 or less mm 1,400 × 2,500 × 2,000 kg Approx.6,000 µm Specification Wafer Diameter Substrate Diameter Grinding Method Grinding Wheels Spindle Machine weight Grinding Accuracy Machine dimensions(W×D×H) www.disco.co.jp 2017.12 |
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