Performance

Full Scale Flow Ranges (N

5 - 50000 sccm

Maximum Inlet Pressure

150 psig (cannot exceed pressure differential requirement across MFC)

normal Operating Pressure Differential (N

5 to 5000 sccm; 10 to 40 psid

(with atmospheric pressure at the MFC outlet)

10000 to 20000 sccm; 15 to 40 psid

30000 to 50000 sccm; 25 to 40 psid

Proof Pressure

1000 psig

Burst Pressure

1500 psig

Control Range

2% to 100% of Full Scale (range on mech.)

Typical Accuracy (with N

±1% of set point for 20 to 100% Full Scale

±0.2% of Full Scale for 2 to 20% Full Scale

Repeatability

±0.3% of Reading

Resolution

0.1% of Full Scale

Temperature Coefficients

Zero

<0.05% of Full Scale/°C

Span

<0.08% of Reading/°C

Inlet Pressure Coefficient

<0.02% of Reading/psi

Typical Controller Settling Time

<750 msec., typical above 5% Full Scale

(per SEMI Guideline E-17-0600)

warm-up Time

30 minutes

(to within 0.2% of Full Scale of steady state performance)

Operating Temperature Range (Ambient)

10°C to 50°C

Storage Humidity

0 to 95% relative humidity, non-condensing

Storage Temperature

-20° to 80°C (-4° to 149° F)

Mechanical

Fittings (compatible with)

Swagelok 8 VCR male, 1/8'' Swagelok, 1/2'' Swagelok,

6 mm Swagelok, 8 mm Swagelok, 10mm Swagelok, 12mm Swagelok,

3/8'' Swagelok, Swagelok 2 VCR Male, KF-16, C-Seal, W-Seal

Leak Integrity

External (scc/sec He)

Through closed valve

<1.0% of Full Scale at 40 psig inlet to atmosphere

(To assure no flow-through, a separate positive shut-off valve is required.)

wetted Materials

Standard

316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality),

Valve Seat (MFC only)

Surface Finish

MFC

10µinchaverageRa(electropolished)

MFM

16µinchaverageRa

weight

less than 3 lbs (1.4kg)

Enclosure Rating

IP66

Electrical Analog I/O

Input Power Required

+15 to +24 VDC @ (<4 watts)

Flow Input/Output Signal

Voltage (0 to 5 VDC)

15 pin Type ''D'' male, 9 pin Type ''D'' male

Current (4 to 20 mA)

15 pin Type ''D'' male

Compliance

CE