AL20060 datasheet(4/4 Pages) MKS

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Specifications and

Ordering Information

Please contact your local MKS sales office for price and availability information.

MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.

Specifications are subject to change without notice. mksinst™ is a trademark and Alter® is a registered trademark of MKS

Instruments, Inc., Andover, MA.

AL 20000 Series - 1/18

AL 20150

Power Output

1- 15 kW

Frequency

2440 - 2470 MHz

Power Regulation

10%

Line Load Regulation

—

Ripple

Max ± 5% of output power

Ambient Temperature

Up to 40°C maximum

Microwave Connections

WR430 waveguide with PDR22 flange

Remote Control Options

RS232, ANYBUS (optional)

AC Power Input

3 x 400 V, 50/60 Hz; 3 x 480 V, 50/60 Hz

Compliance

Power Supply

MPS 24 Option: integrated in cabinet

Dimensions

1500mm (H) x 600mm (W) x 800mm (D)

Cooling

Forced air, approx 800 m3/h; water cooled, 2L/min

Power Head

TM150

Dimensions

280mm (H) x 162mm (W) x 229mm (D)

Cooling

2L/min, max 5 bar (inlet temp: 20-30°C)

Ordering Information

MKS Instruments, Inc.

Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810

Tel:

978.645.5500

Tel:

800.227.8766 (in USA)

Web: www.mksinst.com

MKS Instruments Italy S.r.l.

Plasma & Reactive Gas Solutions

Via P. e M. Curie, 8

42122 Reggio Emilia, Italy

Tel: +39 0522 553 820

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