1

Motorola Sensor Device Data

100 kPa

High Zin, On-Chip Temperature

Compensated & Calibrated

Silicon Pressure Sensors

The new MPX7100 series pressure sensor incorporates all the innovative features of

Motorola’s MPX2000 series family including the patented, single piezoresistive strain

gauge (X–ducer) and on–chip temperature compensation and calibration. In addition, the

MPX7100 series has a high input impedance of typically 10 k

Ω for those portable, low

power and battery–operated applications. This device is suitable for those systems in

which users must have a dependable, accurate pressure sensor that will not consume

significant power. The MPX7100 series device is a logical and economical choice for

applications such as portable medical instrumentation, remote sensing systems with

4 – 20 mAmp transmission and field barometers/altimeters.

Features

• Temperature Compensated Over 0°C to +85°C

• Unique Silicon Shear Stress Strain Gauge

• Easy to Use Chip Carrier Package Options

• Available in Differential and Gauge Configurations

• Ratiometric to Supply Voltage

•±0.25% Linearity (MPX7100D)

Application Examples

• Portable Medical Instrumentation

• Field Altimeters

• Field Barometers

Figure 1 illustrates a schematic of the internal circuitry on the stand–alone pressure

sensor chip.

Figure 1. Temperature Compensated Pressure Sensor Schematic

VS

3

HIGH

Zin

X–ducer

SENSING

ELEMENT

THIN FILM

TEMPERATURE

COMPENSATION

AND

CALIBRATION

CIRCUITRY

2

4

Vout+

Vout–

1

GND

VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE

The differential voltage output of the X–ducer is directly proportional to the differential

pressure applied.

The absolute sensor has a built–in reference vacuum. The output voltage will decrease

as vacuum, relative to ambient, is drawn on the pressure (P1) side.

The output voltage of the differential or gauge sensor increases with increasing

pressure applied to the pressure (P1) side relative to the vacuum (P2) side. Similarly,

output voltage increases as increasing vacuum is applied to the vacuum (P2) side

relative to the pressure (P1) side.

Preferred devices are Motorola recommended choices for future use and best overall value.

Senseon and X–ducer are trademarks of Motorola, Inc.

Order this document

by MPX7100/D

MOTOROLA

SEMICONDUCTOR TECHNICAL DATA

BASIC CHIP

CARRIER ELEMENT

CASE 344–15, STYLE 1

DIFFERENTIAL

PORT OPTION

CASE 344C–01, STYLE 1

MPX7100

SERIES

0 to 100 kPa (0 to 14.5 psi)

40 mV FULL SCALE SPAN

(TYPICAL)

NOTE: Pin 1 is the notched pin.

PIN NUMBER

1

2

Gnd

+Vout

3

4

VS

–Vout

Motorola Preferred Device

REV 3